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Effect of disorder and defects in ion-implanted semiconductors : electrical and physicochemical characterization
Başlık:
Effect of disorder and defects in ion-implanted semiconductors : electrical and physicochemical characterization
Yazar:
Ghibaudo, Gérard.
ISBN:
9780080864426
9780127521459
9781281715517
9786611715519
Yayın Bilgileri:
San Diego : Academic Press, ©1997.
Fiziksel Tanımlama:
1 online resource (xix, 300 pages) : illustrations.
Seri:
Semiconductors and semimetals ; v. 45
Semiconductors and semimetals ; v. 45.
İçerik:
Front Cover; Effect of Disorder and Defects in Ion-Implanted Semiconductors: Electrical and Physicochemical Characterization; Copyright Page; Contents; List of Contributors; Foreword; Preface; Chapter 1. Ion Implantation into Semiconductors: Historical Perspectives; I. Introduction; II. Early History; III. Ion Implanters; IV. Metal-Oxide Semiconductor Devices; V. Bipolar Devices; VI. Conclusions; References; Chapter 2. Electronic Stopping Power for Energetic Ions in Solids; I. Introduction; II. General Theory; III. Electronic Stopping Power for Protons.
IV. Electronic Stopping Power for Heavy IonsV. Electronic Stopping Power for Molecular Ions; VI. Summary; References; Chapter 3. Solid Effect on the Electronic Stopping of Crystalline Target and Application to Range Estimation; I. Introduction; II. Local Density Approximation for Binary Collision; III. Impact Parameter-Dependence of the Electronic Stopping Power in Crystalline Solids; IV. Electronic Stopping Power of Chemical Compounds; V. Electronic Stopping Power and Range Profiles via Computer Simulations; VI. Concluding Remarks; References.
Chapter 4. Ion Beams in Amorphous Semiconductor ResearchI. Introduction; II. Ion Beam Production of Amorphous Silicon; III. Ion Beam Doping of Plasma-Deposited Amorphous Silicon; IV. Structural and Configurational Changes in Amorphous Silicon; References; Chapter 5. Sheet and Spreading Resistance Analysis of Ion Implanted and Annealed Semiconductors; I. Introduction; II. Sheet Resistance Measurement; III. Spreading Resistance Probes Profiling; IV. Applications; V. Summary; References; Chapter 6. Studies of the Stripping Hall Effect in Ion-Implanted Silicon; I. Introduction.
II. Survey of Basic TheoryIII. Applications of the Technique; IV. Conclusions; References; Chapter 7. Transmission Electron Microscopy Analyses; I. Introduction; II. Transmission Electron Microscopy; III. Defects Produced by Ion Implantation, Transmission Electron Microscopy; IV. Implantation Using Molecular Ions; V. Implantation Conditions Inhibiting the Formation of End-of-Range Defects; VI. Material Modification by Ion Beam Synthesis; VII. Ion-Beam-Induced Epitaxial Crystallization; VIII. Closing Remarks; References.
Chapter 8. Rutherford Backscattering Studies of Ion Implanted SemiconductorsI. Introduction; II. Measurement of Disorder Depth Profiles by RBS-Channeling; III. Typical Results for Silicon and Silicon Carbide; References; Chapter 9. X-ray Diffraction Techniques; I. Introduction; II. Basic Aspects of Crystal Lattice Modification Due to Ion-Implantation; III. X-ray Methods to Analyze Implanted Samples; IV. Examples of Special Applications; V. Summary; References; Index; Contents of Volumes in This Series.
Özet:
Defects in ion-implanted semiconductors are important and will likely gain increased importance in the future as annealing temperatures are reduced with successive IC generations. Novel implant approaches, such as MdV implantation, create new types of defects whose origin and annealing characteristics will need to be addressed. Publications in this field mainly focus on the effects of ion implantation on the material and the modification in the implanted layer afterhigh temperature annealing. Electrical and Physicochemical Characterization focuses on the physics of the annealing kinetics of the damaged layer. An overview of characterization tehniques and a critical comparison of the information on annealing kinetics is also presented. Key Features * Provides basic knowledge of ion implantation-induced defects * Focuses on physical mechanisms of defect annealing * Utilizes electrical and physico-chemical characterization tools for processed semiconductors * Provides the basis for understanding the problems caused by the defects generated by implantation and the means for their characterization and elimination.
Tür:
Elektronik Erişim:
ScienceDirect http://www.sciencedirect.com/science/book/9780127521459 ScienceDirect http://www.sciencedirect.com/science/bookseries/00808784/45 ScienceDirect https://www.sciencedirect.com/science/book/9780127521459Mevcut:*
Yer Numarası | Demirbaş Numarası | Shelf Location | Lokasyon / Statüsü / İade Tarihi |
|---|---|---|---|
| QC611.6 .D4 E43 1997 EB | 1190154-1001 | Elsevier E-Kitap Koleksiyonu | Arıyor... |
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