Neuartige poröse strukturen für mems: erzeugung per pulveragglomeration mittels ald = Novel porous structures for MEMS: Fabrication by powder agglomeration by means of ALD
Başlık:
Neuartige poröse strukturen für mems: erzeugung per pulveragglomeration mittels ald = Novel porous structures for MEMS: Fabrication by powder agglomeration by means of ALD