Advances in CMP/polishing technologies for the manufacture of electronic devices
Başlık:
Advances in CMP/polishing technologies for the manufacture of electronic devices
Yazar:
Doi, Toshiro.
ISBN:
9781437778595
Basım Bilgisi:
1st ed.
Yayın Bilgileri:
Oxford : William Andrew, 2012.
Fiziksel Tanımlama:
1 online resource (xii, 317 p.)
Genel Not:
Includes index.
Özet:
CMP and polishing are the most precise processes used to finish the surfaces of mechanical and electronic or semiconductor components. This title presents the developments and technological innovations in the field - making R&D accessible to the wider engineering community.