![Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems için kapak resmi Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems için kapak resmi](/client/assets/d79c3e4af2b6d196/ctx/images/no_image.png)
Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems
Başlık:
Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems
Fiziksel Tanımlama:
1 online resource (599 pages) : illustrations.
Seri:
Woodhead Publishing series in electronic and optical materials, number 42
Woodhead Publishing series in electronic and optical materials ; no. 42.
Notlar:
Electronic reproduction. Ann Arbor, MI : ProQuest, 2016. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.