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![A study of the effects of wet thermal oxidation in AlAs/AlGaAs için kapak resmi A study of the effects of wet thermal oxidation in AlAs/AlGaAs için kapak resmi](/client/assets/d79c3e4af2b6d196/ctx/images/no_image.png)
A study of the effects of wet thermal oxidation in AlAs/AlGaAs
Başlık:
A study of the effects of wet thermal oxidation in AlAs/AlGaAs
Yazar:
Hobbs, Lois, author.
ISBN:
9780438056787
Yazar Ek Girişi:
Fiziksel Tanımlama:
1 electronic resource (106 pages)
Genel Not:
Source: Dissertation Abstracts International, Volume: 76-08C.
Advisors: R. Da La Rue.
Özet:
A thorough search of the literature on the AlAs/AlGaAs selective oxidation process has been undertaken. An overview has been carried out of the history of this oxidation process and its use in device fabrication - and of the chemistry, reaction rates and problems of fabrication. Also the reported lifetime and behaviour of devices manufactured using the oxidation process has been investigated. Modeling of the reflectance behaviour of wafers with different GaAs/AlGaAs epitaxial multi-layer structures on them, and with both oxidized and unoxidised structures, was undertaken prior to the design and growth of a wafer structure for various investigations, as described in chapter 2. Three other layered wafers base on the GaAs/AlGaAs material system was also grown for use in investigations of the oxidation process. The rate of oxidation was investigated at an early stage in joint work with M. Dawson of the Institute of Photonics at Strathclyde University and is reported in Chapter 2. This work was not performed in great detail since the oxidation rates had already been reported at great length and detail in other publications. After oxidation the amount of shrinkages in these layers were measured. The possible delamination of the oxidized material from the supporting GaAs material was investigated in detail, with a useful solution being found to one of the key problems: a particular kind of delamination behaviour. The observation of localised swelling in the area of the oxidation front, before the final onset of shrinkage, was investigated and measured. This swelling had not been previously reported.
Notlar:
School code: 0547
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Yer Numarası | Demirbaş Numarası | Shelf Location | Lokasyon / Statüsü / İade Tarihi |
---|---|---|---|
XX(684537.1) | 684537-1001 | Proquest E-Tez Koleksiyonu | Arıyor... |
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