Eylem Seç
Resolution Enhancement of Contact Photolithography and Development of High Temperature Diamond Sensor
Başlık:
Resolution Enhancement of Contact Photolithography and Development of High Temperature Diamond Sensor
Yazar:
Kim, Tong June, author.
ISBN:
9780438133198
Yazar Ek Girişi:
Fiziksel Tanımlama:
1 electronic resource (153 pages)
Genel Not:
Source: Dissertation Abstracts International, Volume: 79-11(E), Section: B.
Advisors: Zhenqiang Ma Committee members: Michael Corradini; Hongrui Jiang; Zongfu Yu.
Özet:
This thesis systematically studies two main topics, namely, a sub-wavelength patterning method using contact photolithography and the development of a high-temperature diamond thermistor. The first topic introduces a novel sub-wavelength patterning process without the use of advanced optical tools. The method utilizes the re-entrant geometry of image reversal photoresist produced from the developing process, where a second mask is generated by isotropically depositing a metal layer that covers the re-entrant profile of the photoresist. Removing the photoresist by applying ultrasonic vibrations in an acetone bath uniformly cracks the metal layer at the sidewalls of the re-entrant profile, exposing the substrate with a reduced feature size. The width of the initial mask pattern can be reduced down by 400 nm in a controlled manner, regardless of the original width. As a result, the method is shown to achieve sub-100 nm scale linear patterns compatible for both the deposition process and dry etching process. Our approach is applicable to various patterns and can be used in electronic device fabrication requiring nanoscale lithography patterning. The second topic is the development of high-temperature diamond thermistor. Diamond is an excellent material for a thermistor that operates at high-temperature due to its superior material properties such as extreme hardness, high thermal conductivity, and a wide bandgap. Developing a high-temperature diamond thermistor requires a unique design and material choices for an accurate and stable operation at extreme temperatures. A design of the diamond thermistor where the diamond is sandwiched between contact pads are introduced. The thermistor was tested up to 700 °C and characterized by the Steinhart-Hart equations to show that the diamond thermistor successfully operates as a temperature sensor. To extend the operating range and increase the practicality, the thermistor design was improved by encasing it in a metal sheath tube that protects and seals the diamond thermistor. With the improved design, the diamond thermistor can operate up to 880 °C and shows stable performance in cycling tests. A long-term stability test was also performed to show that the metal sheath tube enables the diamond thermistor to be used as a practical temperature sensor.
Notlar:
School code: 0262
Tüzel Kişi Ek Girişi:
Mevcut:*
Yer Numarası | Demirbaş Numarası | Shelf Location | Lokasyon / Statüsü / İade Tarihi |
---|---|---|---|
XX(695294.1) | 695294-1001 | Proquest E-Tez Koleksiyonu | Arıyor... |
On Order
Liste seç
Bunu varsayılan liste yap.
Öğeler başarıyla eklendi
Öğeler eklenirken hata oldu. Lütfen tekrar deneyiniz.
:
Select An Item
Data usage warning: You will receive one text message for each title you selected.
Standard text messaging rates apply.