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Mechanistic Studies of Atomic Layer Deposition and Thermal Atomic Layer Etching Processes of Various Oxide Thin Films
Başlık:
Mechanistic Studies of Atomic Layer Deposition and Thermal Atomic Layer Etching Processes of Various Oxide Thin Films
Yazar:
Rahman, Rezwanur, author.
Fiziksel Tanımlama:
1 electronic resource (171 pages)
Genel Not:
Source: Dissertation Abstracts International, Volume: 80-08(E), Section: B.
Advisors: Yves J. Chabal; Manuel Quevedo-Lopez.
Notlar:
School code: 0382